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发明公开
CN102016101A 水反应性A1复合材料、水反应性A1膜、该A1膜的制造方法、及成膜室用构成部件 有权

水反应性A1复合材料、水反应性A1膜、该A1膜的制造方法、及成膜室用构成部件
摘要：
本发明提供一种水反应性Al复合材料，其在4NAl或5NAl中，以Al基准计，添加0.8～1.4wt％的Bi及以与杂质Si量的总和计成为0.25～0.7wt％的量的Si而成。使用该材料制造的Al喷镀膜及该Al膜的制造。在表面具备有该Al喷镀膜的成膜室用构成部件。
摘要（英）：

A water-reactive Al composite material which consists essentially of 4N Al (aluminum having a purity of 99.99%) or 5N Al (aluminum having a purity of 99.999%), 0.8 to 1.4wt% of Bi, and 0.25 to 0.7wt% (in total) of Si inclusive of contaminant Si, with each percentage being based on Al; an Al sprayed film produced by using the material; production of the Al film; and a constituent member for a film deposition chamber, which member is provided with the Al sprayed film on the surface.

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