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CN101953072A 兰姆波谐振器 失效 - 权利终止

兰姆波谐振器
摘要：
兰姆波谐振器(100)，包括至少一个压电层(102)和靠着压电层(102)的第一面放置的第一电极(106)，第一电极的图案在与压电层(102)的第一面所在平面平行的平面上并包括至少两个手指(108)和接触臂(110)，其中每个手指都包括一个与所述臂接触的第一边和相互平行且相隔距离W的另外两边，W由以下公式计算：其中n∈N，valateral：兰姆波的声传播速度，n：兰姆波谐振模式的阶数，f：谐振器的谐振频率，以及与第一面所在平面处于同一水平且位于第一电极的手指之间的压电层的一些部分(114)，这些部分是经过至少部分蚀刻的。
摘要（英）：

A Lamb wave resonator (100) includes at least one piezoelectric layer (102), and a first electrode (106) against a first face of the piezoelectric layer (102). The pattern of the first electrode, in a plane parallel to the plane of the first face of the piezoelectric layer, includes at least two fingers (108) and a contact arm (110), with each finger including a first side in contact with the contact arm and two other sides parallel to each other and spaced apart by a distance W given by the formula: W=n.va/f, wherein n is in N, va is an acoustic propagation speed of Lamb waves, n is an order of a resonance mode of the Lamb waves, f is a resonance frequency of the Lamb wave resonator. The Lamb wave resonator further includes portions (114) of the piezoelectric layer, which lie in the plane of the first face, between the fingers of the first electrode, being at least partially etched.

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