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发明公开
CN101946401A 压电振动器的制造方法、压电振动器、振荡器、电子设备及电波钟 失效 - 权利终止 转让

压电振动器的制造方法、压电振动器、振荡器、电子设备及电波钟
摘要：
该压电振动器具备：由玻璃材料构成的基底基板，在该基底基板的上表面形成有接合膜；由玻璃材料构成的盖基板，在该盖基板形成有空腔用的凹部，且以使凹部与所述基底基板对置的状态隔着所述接合膜接合至基底基板；压电振动片，在利用所述凹部而收纳于在所述基底基板和所述盖基板之间形成的空腔内的状态下，与基底基板的上表面接合；一对外部电极，形成于所述基底基板的下表面；一对贯通电极，以贯通所述基底基板的方式形成，维持所述空腔内的气密，并且对所述一对外部电极而分别电连接；以及迂回电极，形成于所述基底基板的上表面，并对接合所述一对贯通电极的所述压电振动片分别电连接。
摘要（英）：

A piezoelectric vibrator comprises a base substrate composed of a glass material having a bonding film formed on the upper surface, a lid substrate composed of a glass material having a recess for cavity and bonded to the base substrate through the bonding film under such a state as the recess is facing the base substrate, a piezoelectric vibration piece bonded to the upper surface of the base substrate while being contained in a cavity formed between the base substrate and the lid substrate by utilizing the recess, a pair of external electrodes formed on the lower surface of the base substrate, a pair of through electrodes formed to penetrate the base substrate while maintaining airtightness in the cavity and connected electrically with the pair of external electrodes, respectively, and a routing electrode formed on the upper surface of the base substrate and connecting the pair of through electrodes electrically with the bonded piezoelectric vibration piece.

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