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发明授权
CN101913465B 基板储放匣 失效 - 权利终止

基板储放匣
摘要：
本发明公开一种基板储放匣，包括框体、多条中空悬臂托杆以及至少一个减振装置。这些中空悬臂托杆是配置于框体的储放空间内，且各中空悬臂托杆具有自由端以及固定在框体上的固定端，而这些中空悬臂托杆在第一方向上分别具有第一振动频率。减振装置则是配置在至少一条中空悬臂托杆内，并邻近其自由端。而且，减振装置在第一方向上具有第二振动频率，其中第二振动频率与第一振动频率不相同。
摘要（英）：

The invention discloses a substrate storing box which comprises a frame body, a plurality of hollow cantilever supporting rods and at least one vibration absorber, wherein the hollow cantilever supporting rods are arranged in the storing space of the frame body, and each hollow cantilever supporting rod is provided with a free end and a fixed end fixed on the frame body; the hollow cantilever supporting rods respectively have a first vibration frequency in the first direction; the vibration absorber is arranged in at least one hollow cantilever supporting rod and is close to the free end of the hollow cantilever supporting rod; and the vibration absorber has a second vibration frequency in the first direction, wherein the second vibration frequency is different from the first vibration frequency.

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