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发明授权
CN101792896B 溅射设备及制造电子器件的方法 有权

溅射设备及制造电子器件的方法
摘要：
本发明涉及一种溅射设备，该溅射设备包括附装有靶的可旋转的旋转构件、连接端子和馈电端子。连接端子布置在旋转构件的沿着旋转构件的旋转轴线的方向的端部上并且电连接至靶。馈电端子经由连接端子向靶供应电力。当旋转构件在馈电端子与旋转构件的该端部接触的同时旋转时，切换馈电端子与连接端子之间的电连接或绝缘状态。
摘要（英）：

A sputtering apparatus includes a rotatable rotary member to which a target is attached, connection terminals, and feeding terminals. The connection terminals are arranged on the end portion of the rotary member in a direction along the axis of rotation of the rotary member, and are electrically connected to the target. The feeding terminals supply electric power to the target via the connection terminals. When the rotary member is rotated while the feeding terminals are in contact with the end portion of the rotary member, the electrical connection or insulation state between the feeding terminals and connection terminals is switched.

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