知搜-全球专利检索

  1. 登录
  2. 注册
发明公开
CN101772989A 有机电致发光装置的制造方法 无效 - 驳回

有机电致发光装置的制造方法
摘要：
本发明的课题在于提供一种有机EL装置的制造方法，其在形成包含对有机EL元件进行密封的无机物层的被膜时，可抑制对有机EL元件造成的损害，并且可形成对水蒸气或氧的阻隔性较高的被膜。有机EL元件(20)是在至少一个为透明或半透明的一对电极间夹着包含发光层的有机EL层(22)而构成，密封层(30)包含与有机EL元件(20)接触的至少1层无机物膜并用于密封有机EL元件(20)。在基板(10)上形成有机EL元件(20)及密封层(30)时，利用离子束溅射法来形成密封层(30)中的与有机EL元件(20)接触的第1密封膜(31)，而利用离子束溅射法以外的其他成膜方法来形成密封层(30)中的其他无机物膜。
摘要（英）：

Provided is an organic EL device manufacturing method, by which a film having a high barrier characteristic against vapor and oxygen can be formed while suppressing damages of an organic EL element, at the time of forming the film which contains an inorganic material layer for sealing the organic EL element. An organic EL element (20) is configured by sandwiching an organic EL layer (22), which contains a light emitting layer, between a pair of electrodes at least one of which is transparent or semitransparent. A sealing layer (30) contains at least one inorganic material film brought into contact with the organic EL element (20) and seals the organic EL element (20). At the time of forming the organic EL element and the sealing layer on a substrate (10), a first sealing film (31) which is brought into contact with the organic EL element (20) in the sealing layer (30), is formed by ion beam sputtering method, and other inorganic material film in the sealing layer (30) is formed by a film forming method other than the ion beam sputtering method.

0/0