知搜-全球专利检索

  1. 登录
  2. 注册
发明授权
CN101636519B 电弧式蒸发源 有权 转让

电弧式蒸发源
摘要：
本发明提供一种能够抑制电弧点向阴极蒸发面以外的部分移动的电弧式蒸发源。所述电弧式蒸发源通过由磁场控制的电弧放电来使阴极(22)的阴极物质蒸发，其具备：磁场形成机构(42)，其在阴极前端的蒸发面(22a)附近形成与阴极中心轴(Ax)平行的成分强的磁场(M)，且配置在阴极的外侧；支承机构(26)，其支承阴极；冷却机构(61)，其冷却阴极；锥形环(64)，其形成圆锥台状，具有使阴极沿其轴向贯通的贯通孔，且配置成向着阴极的蒸发面逐渐变细，锥形环由强磁性体构成，使用时锥形环的前端(64a)与阴极的蒸发面位于相同的面或位于比蒸发面稍后退的位置。
摘要（英）：

The invention provides an arc evaporation source in which the arc spot is prevented from moving to another part other than the cathode evaporation surface. An arc evaporation source for evaporating the cathode substance of a cathode (22) by arc electric discharge controlled by a magnetic field. The arc evaporation source comprises a magnetic field producing mechanism (42) adapted for producing a magnetic field (M) having a strong component parallel to the cathode central axis (Ax) near the evaporation surface (22a) at the end of the cathode and disposed outside the cathode, a support mechanism (26) supporting the cathode, a cooling mechanism (61) for cooling the cathode, and a tapered ring (64) having a truncated cone shape and a through-hole through which the cathode extends in the axialdirection of the truncated cone and tapered towards the evaporation surface. The tapered ring (64) is made of a ferromagnetic material. The edge (64a) of the tapered ring is moved to a position flushwith the evaporation surface or a little behind the evaporation surface when in use.

公开/授权文献
0/0