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发明授权
CN101592875B 清洗方法及清洗机台 失效 - 权利终止

清洗方法及清洗机台
摘要：
一种清洗方法，包括，配制包含清洗溶液和氧化溶液的混合溶液；利用所述混合溶液对运行于清洗机台中的所述基底执行清洗操作，所述混合溶液的配置过程是利用所述清洗机台在所述基底的运行过程中完成的，且配制所述混合溶液时放出热量。可增强清洗效果且不增加设备的能量消耗。本发明还提供了一种清洗机台，可增强清洗效果且不增加能量消耗。
摘要（英）：

A cleaning method comprises: preparing mixed solution containing cleaning solution and oxidization solution; using the mixed solution to clean the substrate operating in the cleaning machine, wherein the preparation process of the mixed solution is finished by using the cleaning machine in the operation process of the substrate and heat is discharged during the preparation of the mixed solution. The invention can strengthen cleaning effect without increasing energy consumption of equipment. The invention further provides a cleaning machine to strengthen cleaning effect without increasing energy consumption of equipment.

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