The present invention provides a projection exposure device shortening required period of taking out and reseting a light shading body accompanying replacement of a substrate, and having a simpole light shading body for various light shading zones. The projection exposure device 100 irrdiates light containg ultraviolet radiation to a mask and exposes to the substrate coated with negative photoresist by means of light through the mask of the projection optical system. The projection exposure device has: at least two first light shading bodies 84 for shading light; and a first moving sectoin 82, 83, 86 for moving the first light shading bodies from outside of the subtrate to center, and the first light shading bodies shade light for whole perphery of the substrate.