Disclosed is a corrosion-resistant member which is high in acid resistance, plasma resistance and hydrophilicity. Also disclosed is a method for producing such a corrosion-resistant member. A corrosioDisclosed is a corrosion-resistant member which is high in acid resistance, plasma resistance and hydrophilicity. Also disclosed is a method for producing such a corrosion-resistant member. A corrosion-resistant member having high acid resistance, plasma resistance and hydrophilicity is obtained by surface-treating an object member (such as ceramics and metals) by spraying a superheated water vapon-resistant member having high acid resistance, plasma resistance and hydrophilicity is obtained by surface-treating an object member (such as ceramics and metals) by spraying a superheated water vapor at a temperature of 300-1000 DEG C. The corrosion-resistant member may be a member which is in contact with a processing space within a vapor-phase surface treatment apparatus (such as a chamber) for at a temperature of 300-1000 DEG C. The corrosion-resistant member may be a member which is in contact with a processing space within a vapor-phase surface treatment apparatus (such as a chamber) for surface-treating a base material by a vapor-phase process such as PVD, CVD or dry etching.r surface-treating a base material by a vapor-phase process such as PVD, CVD or dry etching.