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发明授权
CN101518770B 旋涂装置 失效 - 权利终止

旋涂装置
摘要：
一种旋涂装置，其用于在各种盘上涂敷液体，包括：旋转台，其保持盘基板；旋转机构，其使该旋转台旋转；涂料器罩，其配置成将所述旋转台包围并挡住从保持在所述旋转台上的盘基板甩掉的液体；内杯，其挡住而不排出沿着所述涂料器罩滴落的液体；涂料器杯，其支承该内杯，其中，所述内杯能够从所述涂料器杯上卸下；该旋涂装置还包括将液体向所述盘基板供给的液体供给机构，在所述涂料器罩上形成至少一个空中注射用孔，在所述液体供给机构为了防止液体的堵塞而将液体空中注射时，该空中注射用孔用于使该被空中注射的液体流向所述内杯内。由此，能够用内杯将被空中注射的液体回收而不需要其它的回收机构。
摘要（英）：

A spin coating device has a rotating table for holding a disk substrate, a rotation mechanism for rotating the rotating table, a coater cover provided so as to surround the rotating table and receivinA spin coating device has a rotating table for holding a disk substrate, a rotation mechanism for rotating the rotating table, a coater cover provided so as to surround the rotating table and receiving liquid thrown off from the disk substrate, an inner cup for receiving the liquid dropping along the coater cover and not discharging the liquid, and a coater cup for supporting the inner cup. The ing liquid thrown off from the disk substrate, an inner cup for receiving the liquid dropping along the coater cover and not discharging the liquid, and a coater cup for supporting the inner cup. The inner cup is removable from the coater cup.ner cup is removable from the coater cup.

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