The invention proposes a 6-degree of freedom precision positioning platform, comprising a substrate, an X direction long-range electric motor which is provided with a first stator and a first mover, a Y direction long-range electric motor which is provided with a second stator and a second mover, a microchecker which crosses the first stator and is provided with a movable platform, 3 supporting drive rods and piezoceramics drives, wherein, each supporting drive rod is connected with at most 3 piezoceramics drives, at least one out of the 3 supporting drive rods is connected with 3 piezoceramics drives and the total number of the piezoceramics drives connected with the 3 supporting drive rods is not less than 6. The positioning platform of the invention features simple structure and quick response speed of movement, in addition, compared with previous piezoceramics precision positioning platform, the platform of the invention improves ranges, increases the stability of the microcheckerand simplifies decoupling control; moreover, the platform of the invention can reduce vibration reduction actively.