The invention provides a micromachine latch switch device which consists of an underlay, anchoring points, contact terminals, flexible girders and a detection mass block; wherein, the contact terminals comprise a top contact terminal, a movable contact terminal and two side contact terminals; the side contact terminals are respectively arranged at the two sides of the movable contact terminal; the flexible girders comprise the flexible girder of the top contact terminal, the flexible girder of the movable contact terminal, the flexible girders of the side contact terminals and a detection flexible girder; the contact terminals and the detection mass block are respectively and fixedly connected with the flexible girders of each own; and the flexible girders are fixed on the underlay by utilizing the corresponding anchoring points. The micromachine latch switch device adopts the mutually independent multi-contact point contact mode of each contact terminal, which not only reduces a contact resistance, enlarges an allowable current and improves the contact reliability of the contact points. In the invention, each contact terminal is mutually independent with the detection mass block, can not be affected by the rebounding and vibration of the detection mass block after being latched and improves the vibration-resistance capacity and the reliability of the switch.