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发明公开
CN101403829A 对位检测方法和对位检测装置 无效 - 撤回

对位检测方法和对位检测装置
摘要：
本发明提供一种对位检测方法和对位检测装置。此对位检测方法包括对位芯片的芯片对准标记于透光基板的基板对准标记上；利用第一检测单元来穿透过芯片，而撷取芯片对准标记的位置；利用第二检测单元来穿透过透光基板，而撷取基板对准标记的位置；以及比对芯片对准标记的位置与基板对准标记的位置。本发明的对位检测方法和对位检测装置可确实地检测芯片是否准确地对位于透光基板上。
摘要（英）：

The invention provides a contraposition detection method and a contraposition detection device. The contraposition detection method comprises that the chip of a contraposition chip is aligned with a baseplate alignment mark marked on a transmission baseplate; a first detection unit is used for penetrating the chip so as to retrieve the position of the mark aligned with the chip; a second detection unit is used for penetrating the transmission baseplate so as to retrieve the position of the mark aligned with the baseplate; the alignment positions between the chip and the mark are compared. The contraposition detection method and the contraposition detection device of the invention can surely detect whether the chip is correctly positioned on the transmission baseplate.

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