The invention discloses an evaluation method for ion beam chevillier modification shape ability. The steps of the invention comprises utilizing materials to remove effective rate as an evaluating indicator to quantify chevillier process modification shape ability, defining the evaluating indicator as an evaluation of estimate for the modification shape ability, fourier transforming the removal function via confirming the removal function, thereby calculating evaluation function of the modification shape ability in the chevillier process, then, calculating the evaluation of estimate for the modification shape ability according to the evaluation function of the modification shape ability, thereby evaluating and judging the shape modification ability in the chevillier process. The method of the invention not only can evaluate and judge the shape modification ability of different spatial frequency errors in the same chevillier process, but also can evaluate and judge the modification shape ability in different chevillier process. Further, the method of the invention has the advantages of simple operation, accurate judging, wide scope of application and the like.