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发明授权
CN100590826C 引线清洗导向装置 失效 - 权利终止

引线清洗导向装置
摘要：
本发明涉及引线清洗导向装置。设有等离子发生室(41)，从等离子用气体供给部(34)供给等离子用气体，从等离子发生用的高频电力供给部(32)供给高频电力，引线(12)通过设在等离子发生室(41)的绝缘套(43，45)的导向孔(44，46)。引线(12)接地，在引线(12)和等离子发生室之间通以高频电力，在等离子发生室内部使得等离子用气体等离子化，清洗引线(12)。使得引线输出部侧导向孔(44)的孔径比焊接工具侧导向孔(46)的孔径大，以便使得从引线输出部侧的导向孔(44)流出的引线清洗后的气体流量比从焊接工具侧的导向孔(46)流出的引线清洗后的气体流量多。在接合装置中，焊接时在引线路线上能有效除去引线表面异物。
摘要（英）：

The invention relates to a wire guiding and cleaning apparatus. The apparatus includes a plasma generating chamber, a gas supply nozzle for supplying plasma generating gas, a high frequency power supply section for supplying high-frequency power, and guide holes disposed on insulation bushings where the wire gets through. The wire is connected to the ground, high-frequency power is applied betweenwire and plasma generating chamber to ionize gas for ionization in the plasma generating chamber, so that wire is cleaned. The diameter of the wire-feeder-side guide hole is greater than that of thebonding-tool-side guide hole so that the outflow rate of gas after wire cleaning flowing from the wire-feeder-side guide hole is greater than that of gas after wire cleaning flowing from the bonding-tool-side guide hole. Foreign substances on the surface of a wire are removed effectively on the path of the wire in the bonding device.

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